Carbon dioxide is widely recognized today as a “Green Chemistry” solvent. The unique physical and chemical properties of carbon dioxide in its supercritical state, namely the absence of surface tension, low viscosity, high diffusivity, and easily tunable solvent strength provide for utility in a variety of industrial and scientific applications. In the microelectronics fabrication industry this non-toxic, environmentally friendly solvent is being heavily investigated as an alternative agent for device cleaning, microelectromechanical systems (MEMS) drying, and lithographic processing. With the emerging advances in fabrication techniques and materials, microelectronic device features with dimensions below 100 nm are now possible to produce.